Nanostructured surface fabricated by laser interference lithography to attenuate the reflectivity of microlens arrays
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چکیده
منابع مشابه
Fabrication and Optical Characterization of Silicon Nanostructure Arrays by Laser Interference Lithography and Metal-Assisted Chemical Etching
In this paper metal-assisted chemical etching has been applied to pattern porous silicon regions and silicon nanohole arrays in submicron period simply by using positive photoresist as a mask layer. In order to define silicon nanostructures, Metal-assisted chemical etching (MaCE) was carried out with silver catalyst. Provided solution (or materiel) in combination with laser interference lithogr...
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ژورنال
عنوان ژورنال: Journal of the European Optical Society: Rapid Publications
سال: 2010
ISSN: 1990-2573
DOI: 10.2971/jeos.2010.10006